ISSM 2008 - INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING

AEC/APC Tutorial Session

Target:

AEC/APC Engineer in beginner to intermediate level
Engineer in charge of element process
Leveraged as outsourcing in-house education about AEC/APC

Speaker:

Mr. Toshihiko Osada

Introduction of AECAPC's history

Recent new trends
How to utilize the equipment is indispensible issue for good product yield and quality. AECAPC, Advanced Equipment Control and Advanced Process Control, is the key scheme of the equipment control in the factory integration. This area has recently made remarkable progress after 20 years' continual efforts, and I would like to introduce this recent new trend around the world.

Mr. Kensuke Uriga

Manufacturing engineering and AEC/APC

Integration of equipment data monitoring and analysis
It explains a real-time monitor of the equipment in the semiconductor production line and the integration of the equipment data analysis. The problem of a current mounting system is considered from the aspect that develops an effective equipment model.

Mr. Hiroshi Shimizu

Application of control theory for AEC/APC in semiconductor fabrication -

Matured control theory in process industries sheds light on control technologies for AEC/APC in semiconductor fabrication
In the field of AEC/APC in semiconductor, various challenges have been done to control the processes more tightly to satisfy the rapid shrinkage of design rules. From the viewpoint of control theory matured in other industries, we'll try to clarify the following issues on APC in semiconductor industry.
- Metrology and control models for APC
- Current status
- Future direction and its applicable control technologies