Tutorials
The tutorial session of ISSM2008 is its first appearance into ISSM held in Japan.
Schedule
9:30乣12:00, Monday, October 27th. Hyatt Regency Tokyo
Registration
ISSM 2008 Registration starts.
AEC/APC(Advanced Equipment Control/Advanced Process Control) Tutorial Session (Japanese Only) Planned by AEC/APC Japan Committee
- General description of the past transition and the present situation about AEC/APC
- Detailed discussion of the Positioning in integrated management at fab, Modeling clarification from the statistical and physical approach
- Specific case example from the point of view of the specialist
ESH(Environment, Safety and Health) Tutorial Session
- General issues related ESH aspects of advanced s/c manufacturing
- Some detailed discussion of topics related to technologies for reducing usage of resources (water, energy, and chemicals) in modern fabs
- Specific ESH issues of nano-technology, what is unique, what are their specific ESH problems, and what is the latest on ESH solutions for current and future nano-manufacturing.