ESH 僠儏乕僩儕傾儖 僙僢僔儑儞
懳徾:
抧媴偵桪偟偄娐嫬壽戣偵懳偡傞堄幆偑崅傑傞帠偵傛?zhèn)鐲SR(婇嬈偺幮夛揑愑擟)偑媮傔傜傟偰偄傑偡丅 敿摫懱惢憿偵偍偗傞娐嫬晧壸掅尭丄尷傝偁傞帒尮曐慡傊偺峷專傪捠偠婇嬈僽儔儞僪偺岦忋傪帇栰偵怴偨側(cè)價(jià)僕僱僗揥奐傪扵傝傑偡丅
島巘:
Farhang Shadman嫵庼
傾儕僝僫戝妛巜摫嫵庼丂壔妛岺妛偲娐嫬岺妛
Farhang Shadman嫵庼偼1972擭偵僇儕僼僅儖僯傾戝妛僶乕僋儗乕峑偵偰攷巑崋庢摼丅
尰嵼偼傾儕僝僫戝妛偺壔妛岺妛偲娐嫬岺妛偺巜摫嫵庼丄 Engineering Research丂Center for Environmentally Benign Semiconductor Manufacturing乮娐嫬偵傗偝偟偄敿摫懱惢憿偺偨傔偺僄儞僕僯傾儕儞僌儕僒乕僠僙儞僞乕乯屭栤傪柋傔偰偄傑偡丅 SEMATECH偵偍偄偰偼丄敿摫懱惢憿偺寚娮娗棟僙儞僞乕偺憂愝幰偱偁傝丄尰嵼傕屭栤傪嬑傔偰偄傑偡丅傑偨丄暷崙壔妛岺妛夛偺僼僃儘乕偱傕偁傝傑偡丅
110埲忋偺嶨帍婰帠丄彂愋摍傪幏昅偟丄21偺摿嫋/敪柧傪曐帩偟偰偄傑偡丅SAI丂堜忋 濎徿(2002)丄Landmark Innovation award(2000)丄 SRC/Sematech/SIA Excellence in Research Award(1998偍傛?zhèn)?992)丄敪柧徿(SRC 1991偲1992)傪庴徿偟偰偄傑偡丅
SUSTAINABILITY AND ESH ASPECTS OF ADVANCED SEMICONDUCTOR MANUFACTURING
崅搙敿摫懱惢憿偵偍偗傞丄僒僗僥僫價(jià)儕僥傿偲ESH
奺40暘偺3偮偺僔儑乕僩僐乕僗偐傜側(cè)傝丄偦傟偧傟偺僙僢僔儑儞偱10暘娫偺幙媈偑峴傢傟傑偡丅
僷乕僩1:
崅搙側(cè)敿摫懱惢憿偺ESH偵娭偡傞堦斒壽戣
丂丂尰嵼丒夁嫀丒枹棃偺ESH僠儍儗儞僕偲僠儍儞僗
丂丂敿摫懱惢憿偵娭偡傞丄僒僗僥僫價(jià)儕僥傿偺媄弍帇揰
丂丂ESH壽戣偵傛?zhèn)閶Z弍僽儗乕僋僗儖乕偺椺
丂丂怴婯媄弍奐敪傊偺ESH偺曇擖偺僞僀儈儞僌偲愴?xiàng)?br />
僷乕僩2:
尰戙偺岺応偵帒尮(悈丄僄僱儖僊乕偲壔妛暔幙)偺巊梡嶍尭偺偨傔偺僥僋僲儘僕乕偵娭偡傞榖戣
丂丂條乆側(cè)帒尮巹梡偱偺憡屳娭學(xué)
丂丂悈偺巊梡嶍尭丒儕僒僀僋儖丒嵞巊梡偺斾妑偲嵟揔壔
丂丂帒尮巊梡検嶍尭偵娭偡傞怴偟偄媄弍
僷乕僩3:
僫僲-僄儗僋僩儘僯僋僗偺惔憒偵娭楢偟偨嬶懱揑側(cè)挧愴偲婡夛
丂丂儅僀僋儘偐傜僫僲僗働乕儖惢憿偵埲崀偡傞嵺偵梊憐偝傟傞壽戣偺摿庩惈
丂丂娐嫬偵懳偡傞丄椙偄塭嬁偲埆偄塭嬁
丂丂尰嵼偲彨棃偺僫僲-惢憿偵偍偗傞ESH夝寛嶔偺嵟怴奐敪偵偮偄偰