僾儘僌儔儉僗働僕儏乕儖
2025擭11寧25擔
Opening Session
Session Chair: Rapidus 奰徖 塸懃
| 13:00 - 13:10 | 僆乕僾僯儞僌
AEC/APC Symposium Asia 2025 塣塩埾堳挿 / 儖僱僒僗 僄儗僋僩儘僯僋僗 暉壀導暃抦帠 AEC/APC Symposium Asia 2025 僾儘僌儔儉埾堳挿 / 僜僯乕僙儈僐儞僟僋僞儅僯儏僼傽僋僠儍儕儞僌 |
Tutorial speech 1
Session Chair: Rapidus 奰徖 塸懃
| 13:10 - 13:55 | Tutorial 1 僒僀僶乕僼傿僕僇儖僔僗僥儉偺幚尰偲嶻嬈墳梡偺偨傔偺悢棟偍傛傃忣曬媄弍摗郪 崕庽 搶嫗壢妛戝妛 |
Session 1
Session Co-Chairs: 僉僆僋僔傾 怷塱 桾擵丄擔棫僴僀僥僋 幁巕搱 徍
| 13:55 - 14:15 | DA-014 僥僉僗僩夝愅偲RAG傪梡偄偨愝旛惗嶻惈夵慞Takashi Iuchi Sony Semiconductor Manufacturing |
| 14:15 - 14:35 | DA-019 The Integration of Machine Learning and Equipment Knowledge: Two Approaches to Film Deposition Data AnalysisHuizhen,Bu Tokyo Electron Technology Solutions |
| 14:35 - 14:55 | PTL-018 婡夿妛廗偲僪儊僀儞抦幆傪梡偄偨PPC僔僗僥儉偺夵慞Xueting Wang TOSHIBA ELECTRONIC DEVICES & STORAGE |
| 14:55 - 15:15 | PTL-012 Backcasting AI媦傃Forecasting AI偵傛傞僔儞僌儖僂僃乕僴僂僃僢僩僄僢僠儞僌偵偍偗傞儕傾儖僞僀儉側帺摦儗僔僺嶌惉丒専徹僔僗僥儉Koki Shibata The University of Tokyo |
| 15:15 - 15:45 | 媥宔丒揥帵 |
Keynote speech 1
Session Chair: 儖僱僒僗 僄儗僋儘僩僯僋僗 媨晲 崉
| 15:45 - 16:30 | Keynote 1 僷儚乕敿摫懱儌僕儏乕儖偺媄弍摦岦嶳揷 弴帯 嶰旽揹婡姅幃夛幮 |
Session 2
Session Co-Chairs: 儖僱僒僗 僄儗僋僩儘僯僋僗 拞嶳 抦巑丄僀儞僼傿僐儞 搚嶳 梞巎
| 16:30 - 16:50 | DA-017 Human-aided Relabeling and Outlier Sample Selection for Semiconductor InspectionTeguh Budianto Toshiba |
| 16:50 - 17:10 | DA-020 Semi-Automatic Critical Dimension Measurement Method in SEM Image with Critical Point Mapping AlgorithmTakahiro Nakamura Tokyo Electron |
| 17:10 - 17:30 | DA-011 Graph-Based Clustering for Detection of Subtle Defect Patterns in High-Yield Semiconductor Wafer MapsManami Yamagiwa Mie University |
| 17:30 - 17:50 | DA-016 Detection and Localization of Defects Using Masked Image ModelingAkira Yasuda University of Tsukuba |
| 17:50 - 18:20 | 僆乕僒乕僘僀儞僞價儏乕 for Session 1 & 2 |
| 18:20 - 20:20 | 儗僙僾僔儑儞丒揥帵 儖僱僒僗 僄儗僋僩儘僯僋僗 惣懞 塸岶 |
2025擭11寧26擔
| 9:00 - 9:05 | 僾儘僌儔儉傾僂僩儔僀儞乮2擔栚乯 郌栘 弐堦僜僯乕僙儈僐儞僟僋僞儅僯儏僼傽僋僠儍儕儞僌 |
Keynote speech 2
Session Chair: Rapidus 暯堜 搒巙栫
| 9:05 - 9:50 | Keynote 2 嵟愭抂敿摫懱岺応偺慡帺摦壔傪幚尰偡傞CIM僔僗僥儉暈晹 棽堦榊 Rapidus |
Session 3
Session Co-Chairs: 搶嫗僄儗僋僩儘儞 揷拞 彯恖丄僞儚乕僷乕僩僫乕僘僙儈僐儞僟僋僞乕 揷拞 抦嵠
| 9:50 - 10:10 | YM-023 Building an Engineering Automation System Using Generative AI and Agentic AIHyukjun Na Aydentyx |
| 10:10 - 10:30 | PTL-015 From Detection to Diagnosis: Enhancing SPC with AI-Powered Root Cause AnalysisVishali Ragam Applied Materials |
| 10:30 - 10:50 | FAB-010 A Novel Chamber Level Smart Sampling Approach in Semiconductor ManufacturingYan-Qiu Zhang Fujian Jinhua Integrated Circuit Co., Ltd |
| 10:50 - 11:10 | YM-009 Reducing Packaging Costs in Semiconductor Fabs through Predictive Testing ModelsMelvin Lee Wei Heng Onto Innovation |
| 11:10 - 11:40 | 僆乕僒乕僘僀儞僞價儏乕 for Session 3 |
Tutorial speech 2
Session Chair: 搶幣僨僶僀僗&僗僩儗乕僕 挿搱 堦崅
| 11:40 - 12:25 | Tutorial 2 敿摫懱惢憿偵偍偗傞僾儘僙僗僀儞僼僅儅僥傿僋僗栁栘 峅揟 搶嫗僄儗僋僩儘儞 |
| 12:25 - 13:20 | 儔儞僠僞僀儉丒揥帵 |
Keynote speech 3
Session Chair: 僆僼傿僗嶰戭 嶰戭 尗帯
| 13:20 - 14:05 | Keynote 3 懡條壔偡傞敿摫懱偵挧傓屻岺掱媄弍 ~僷儚乕/CIS~攏応 怢帯 傾儉僐乕丒僥僋僲儘僕乕丒僕儍僷儞 |
Session 4
Session Co-Chairs: 傾僘價儖 棫愇 岾堦丄擔杮傾僀丒價乕丒僄儉 僨僕僞儖僒乕價僗 戝愇 廋
| 14:05 - 14:25 | SN-022 僄僢僕偵偍偗傞愭抂僙儞僒乕僨乕僞傊偺AI/ML揔梡Charlie Sowerby INFICON |
| 14:25 - 14:45 | VM-013 儀乕僉儞僌婥壔儌僕儏乕儖偺儌僨儖儀乕僗僩塼懱僾儕僇乕僒嫙媼Daisuke Hayashi HORIBA STEC, Co., Ltd. |
| 14:45 - 15:05 | YM-021 僼傽僂儞僪儕偵偍偗傞彮検惗嶻CIS惢昳偺曕棷岦忋妶摦Takatoshi Yasui Tower Partners Semiconductor |
| 15:05 - 15:30 | 僆乕僒乕僘僀儞僞價儏乕 for Session 4 /Exhibition |
| 15:30 - 15:40 | 傾儚乕僪僙儗儌僯乕 郌栘 弐堦僜僯乕僙儈僐儞僟僋僞儅僯儏僼傽僋僠儍儕儞僌 |
| 15:30 - 15:45 | 暵夛 惣懞 塸岶儖僱僒僗 僄儗僋僩儘僯僋僗 |
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