Tutorial Speakers
Katsuki Fujisawa
Professor, Institute of Integrated Research, Institute of Science TokyoBiography
March 1998: Earned a Ph.D. in Science from the Graduate School of Information Science and Engineering, Tokyo Institute of Technology.
Since April 1998, he has held positions at Kyoto University, Tokyo Denki University, Chuo University, and Kyushu University, and he is currently a Professor at the Institute of Innovative Research, Institute of Science Tokyo, while also serving as CTO of the U.S. company PGR.
His expertise includes mathematical optimization, graph analysis, deep learning, high-performance computing, and industrial applications. He actively collaborates with numerous private companies on the development and application of digital twin technology.
He has received numerous awards, including the Minister of Education, Culture, Sports, Science and Technology Award for Science and Technology (Research Division) and first place in the Graph500 benchmark for a total of 20 terms.
Presentation
Mathematical and Information Technologies for the Realization and Industrial Applications of Cyber-Physical Systems
By leveraging the latest advancements in mathematics and information technology, various fields are actively working to build Cyber-Physical Systems (CPS) and foster industry-academia collaboration aimed at addressing the challenges faced by cities, regions, and industries.
This talk will highlight an ongoing Smart Factory development project, focusing on application development to enhance productivity, reliability, and safety in factories, as well as on optimization models for human and material mobility and their practical applications in industry.
Hironori Moki
Vice President, Equipment Intelligence & App R&D Dept., Innovative Technology Development Center, Corporate Technology Division, TOKYO ELECTRON LTD.Biography
Joined Tokyo Electron Sapporo in 2000 as a software engineer and engaged in the development of control software for semiconductor manufacturing equipment. Since 2011, I have been involved in a project for the introduction of machine learning. I developed internal analysis tools, implemented anomaly detection using predictive models, and developed equipment systems for process control. In 2020, I transferred to Tokyo Electron Miyagi and led a project to promote the digital transformation of process development. In 2024, I returned to the Tokyo Electron, I lead the development related to the intelligence enhancement of equipment.
Presentation
Process Informatics in Semiconductor Manufacturing
The recent advancements in AI technology have been remarkable, and generative AI has become commonplace in our daily lives. In this lecture, we will focus on the application of AI technologies in semiconductor manufacturing processes. Along with case studies, we will introduce examples of process informatics applied to semiconductor manufacturing, and explain machine learning and optimization techniques, which are key technologies for realizing process informatics.
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