ISSM 2012 - INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING

COMMITTEE

Japan Organizing Committee

Chairman:

Shozo Saito, Toshiba Corp.

Vice Chairman:

Tadahiro Ohmi, Tohoku University

Committee:

Keiji Horioka, Applied Materials Japan, Inc.

Hirofumi Uchida, Dainippon Screen Mfg. Co., Ltd.

Haruyoshi Yagi, Fujitsu Semiconductor Ltd.

Michihiro Inoue, National Institute of Advanced Industrial Science and Technology (AIST)

Yoshitake Ito, Omron Corp.

Hiroyuki Umimoto, Panasonic Corp.

Tetsuya Tsurumaru, Renesas Electronics Corp.

Shuichi Inoue, Renesas Electronics Corp.

Takahisa Yamaha, Rohm Co., Ltd.

Takanobu Kaitsuka, Tokyo Electron Ltd.

Tadashi Nishimura, Tokyo Institute of Technology

Takashi Yoda, Toshiba Corp.

Japan Advisory Board

Board Members

Satoru Ito

Katsuhiro Tsukamoto, Mitsubishi Electric Corp.

Hajime Sasaki, NEC Corp.

Tsuyoshi Kawanishi, TEK Consulting

Japan Executive Committee

Chairman:

Shuuichi Inoue, Renesas Electronics Corp.

Vice Chairman:

Makoto Hirayama, State University of New York, College of Nanoscale Science and Engineering

Committee:

Keiji Horioka, Applied Materials Japan, Inc.

Hirofumi Uchida, Dainippon Screen Mfg. Co., Ltd.

Kensuke Uriga, Dura Systems, Inc.

Takeshi Hattori, Electronic Journal

Isamu Hanyu, Fujitsu Semiconductor, Ltd.

Hiroyuki Chuma, Hitotsubashi University

Naoki Kitano, Intel K.K

Masao Shimizu, Omron Corp.

Hiroyuki Umimoto, Panasonic Corp.

Koji Maekawa, PDF Solutions, Inc.

Akira Kamisawa, Rohm Co., Ltd.

Yoichi Nakagawa, SEMI

Masayasu Tsunematsu, Semiconductor Equipment Association of Japan（SEAJ)

Jun Ueda, Semiconductor Industry Research Institute of Japan(SIRIJ)

Takanobu Kaitsuka, Tokyo Electron, Ltd.

Takashi Yoda, Toshiba Corp.

Japan Program Committee

Chairman:

Toshiyuki Uchino, Renesas Electronics Corp.

Executive Vice Chairman:

Ayako Shimazaki, Toshiba Corp.

Vice Chairman:

Kiyotaka Imai, KLA-Tencor Japan Ltd.

Hidetoshi Koike, Toshiba Microelectronics Corp.

Committee leader:

Kazunori Kato, Advanced Interface Technology Corp.

Katsutoshi Ozawa, OMRON Corp.

Shin-ichi Imai, Panasonic Corp.

Isamu Namose, Seiko Epson Corp.

Committee:

Shinsuke Mizuno, Applied Materials Japan, Inc

Itaru Namura, Fujitsu Semiconductor Ltd.

Kenji Watanabe, Hitachi High-Technologies Corp.

Eisuke Nishitani, Hitachi kokusai Electric Inc.

Fumitaka Homma, LAPIS Semiconductor Co., Ltd.

Masahiro Shinbo, SANYO Semiconductor Co.,Ltd.

Minoru Akaishi, SANYO Semiconductor Co.,Ltd.

Takatoshi Yasui, Panasonic Corp.

Kenji Miyake, PMT Corp.

Takeshi Akimoto, Renesas Electronics Corp.

Yoshio Iwata, Renesas Electronics Corp.

Toshiharu Katayama, Renesas Electronics Corp.

Kazuki Yokota, Renesas Electronics Corp.

Yoshiaki Yamamoto, Renesas Electronics Corp.

Kyoichi Komachi, Rohm Co., Ltd.

Yoshiaki Oku, Rohm Co., Ltd.

Mitsuteru Kubo, Sony Semiconductor Corp.

Yuj Ezaki, Texas Instruments Japan Ltd.

Misako Saito, Tokyo Electron, Ltd.

Hiromi Yajima, Toshiba Corp.

International Program Committee

Chairman:

Thomas Sonderman, GlobalFoundries

Committee:

Bill Arnold, ASML

Aarthi Venkateshan, Canon Anelva Corp.

Jeff McNeil, Cypress

Lothar Pfitzner, Fraunhofer - IIS-B

Linda Milor, Georgia Tech

Els Van Moorhem, IMEC

Scott Kramer, Mattson Technology

Shi-Chung Chang, National Taiwan University

Keith J. Hansen, Novellus Systems Inc.

Fumitake Mieno, SMIC

Christian Carlier, ST Microelectronics

SY Sheen, TSMC

Risto Puhakka, VLSI Research