傾僽僗僩儔僋僩
Opening & Tutorial 1 Speech
Session chair : 暯堜丂搒巙栫 (KOKUSAI ELECTRIC)
| 9:45 | Opening Remarks from AEC/APC Asia 惣懞丂塸岶 儖僱僒僗僄儗僋僩儘僯僋僗 |
| 9:50 | 僾儘僌儔儉傾僂僩儔僀儞 奰徖丂塸懃 僉僆僋僔傾 |
| 9:55 | Tutorial-1 [ ONLINE ] 恖岺抦擻丒婡夿妛廗偵傛傞幚慔揑側暘巕丒嵽椏丒僾儘僙僗偺愝寁偍傛傃僾儘僙僗娗棟嬥巕 峅徆 柧帯戝妛 |
Session 1
Session chair : 揷拞丂彯恖 (搶嫗僄儗僋僩儘儞)丄崟郪丂宧 (傾僘價儖)
| 10:40 | GX-018 [ ONLINE ] Smart Subfab Transformation using Context-Based ControlHolland Smith 僀儞僼傿僐儞 View Abstract |
| 11:00 | PTL-013 Unified Platform for detecting faults governed by Process ControlsVishali Ragam 傾僾儔僀僪 儅僥儕傾儖僘 Applied Materials View Abstract |
| 11:20 | DA-016 Mixed-type Defect Pattern ClassificationsTakumi Maeda 拀攇戝妛 View Abstract |
| 11:40 | YM-009 夋憸惗惉儌僨儖傪梡偄偨枹抦僷僞乕儞偺晄椙僂僃僴儅僢僾暘椶偵娭偡傞堦専摙Seima Sakaguchi 嶰廳戝妛 View Abstract |
| 12:00 | 揥帵丒拫怘 |
Keynote Speech
Session chair : 奰徖丂塸懃 (僉僆僋僔傾)
| 13:00 | Keynote 僐儞僺儏乕僥傿儞僌偺枹棃 - 價僢僩/僯儏乕儘儞/僉儏乕價僢僩 -嶳摴 怴懢榊 擔杮傾僀丒價乕丒僄儉 搶嫗婎慴尋媶強 |
Session 2
Session chair : 捚扟丂岶桾 (儐僫僀僥僢僪丒僙儈僐儞僟僋僞乕丒僕儍僷儞)丄揷拞丂抦嵠(僞儚乕 僷乕僩僫乕僘 僙儈僐儞僟僋僞乕)
| 13:45 | PTL-007 Machine Learning Based Virtual Metrology for Effective Process Control in High Product Mix ManufacturingHyung Joo Lee Siemens EDA View Abstract |
| 14:05 | PTL-019 掅奐岥棪僄僢僠儞僌偺廔揰専弌偺偨傔偺RF儌僯僞儕儞僌曽朄Chuhua Song 僀儞僼傿僐儞 INFICON View Abstract |
| 14:25 | PTL-008 Comparison of Numerical Method with Prefixed Profile and Machine Learning-based Method for Wet Etching Amount PredictionChihiro Matsui 搶嫗戝妛 View Abstract |
| 14:45 | DA-012 僷儚乕僩儔儞僕僗僞偺摿惈偽傜偮偒偺曣廤抍悇掕偲夞楬僔儈儏儗乕僔儑儞傊偺墳梡Haruka Fukumoto 儘乕儉 View Abstract |
| 15:05 | DA-017 屻岺掱偵偍偗傞婡夿妛廗傪梡偄偨晄椙棪梊應Yumiko Miyaji 僜僯乕僙儈僐儞僟僋僞儅僯儏僼傽僋僠儍儕儞僌 View Abstract |
| 15:25 | 揥帵丒僐乕僸乕僽儗僀僋 |
Tutorial 2 Speech
Session chair : 嶰戭丂尗帯 (僆僼傿僗嶰戭)
| 15:45 | Tutorial-2 僠僢僾儗僢僩廤愊媄弍孖揷 梞堦榊 搶嫗岺嬈戝妛 |
Session 3
Session chair : 搚嶳丂梞巎 (僀儞僼傿僐儞)丄郌栘丂弐堦 (僜僯乕僙儈僐儞僟僋僞儅僯儏僼傽僋僠儍儕儞僌)
| 16:30 | DA-011 屘忈梊抦婡擻傪搵嵹偟偨僀儞僥儕僕僃儞僩儌乕僞僶儖僽Hiroyuki Kawazato 怢榓僐儞僩儘乕儖僘 View Abstract |
| 16:50 | MEP-010 Development of Versatile Fault Detection Using Image SensorsTakuya Sugiura 儖僱僒僗僄儗僋僩儘僯僋僗 View Abstract |
| 17:10 | DA-014 Anomaly detection of semiconductor manufacturing equipment by cluster analysisYuki Shiga KOKUSAI ELECTRIC View Abstract |
| 17:30 | PTL-015 Root Cause Analysis of Plasma Processes Perturbation using Optical Emission Spectroscopy Signals with Modified AutoencoderJaehyeon Kim Sungkyunkwan Univ. View Abstract |
Author乫s Interview / Supplier Exhibition / Reception & Awards
Session chair : 嶁杮丂峗堦 (搶嫗僄儗僋僩儘儞)
| 18:00 | 僆乕僒乕僘僀儞僞價儏乕 |
| 18:30 | 揥帵丒儗僙僾僔儑儞 |
| 19:20 | Best Paper & Student Award |
News/Announcement
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